JPH086275Y2 - 静電容量式荷重センサ - Google Patents
静電容量式荷重センサInfo
- Publication number
- JPH086275Y2 JPH086275Y2 JP1987192020U JP19202087U JPH086275Y2 JP H086275 Y2 JPH086275 Y2 JP H086275Y2 JP 1987192020 U JP1987192020 U JP 1987192020U JP 19202087 U JP19202087 U JP 19202087U JP H086275 Y2 JPH086275 Y2 JP H086275Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- movable electrode
- fixed substrate
- fixed
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 53
- 239000000956 alloy Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000004519 grease Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 2
- 230000035939 shock Effects 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987192020U JPH086275Y2 (ja) | 1987-12-19 | 1987-12-19 | 静電容量式荷重センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987192020U JPH086275Y2 (ja) | 1987-12-19 | 1987-12-19 | 静電容量式荷重センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0197229U JPH0197229U (en]) | 1989-06-28 |
| JPH086275Y2 true JPH086275Y2 (ja) | 1996-02-21 |
Family
ID=31482898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987192020U Expired - Lifetime JPH086275Y2 (ja) | 1987-12-19 | 1987-12-19 | 静電容量式荷重センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH086275Y2 (en]) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525373B2 (en]) * | 1972-02-04 | 1980-07-05 | ||
| DE2938205A1 (de) * | 1979-09-21 | 1981-04-09 | Robert Bosch Gmbh, 7000 Stuttgart | Kapazitiver druckgeber und auswerteeinrichtung hierfuer |
| JPS60233863A (ja) * | 1984-05-04 | 1985-11-20 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
| JPS61272623A (ja) * | 1985-05-29 | 1986-12-02 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
-
1987
- 1987-12-19 JP JP1987192020U patent/JPH086275Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0197229U (en]) | 1989-06-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4380041A (en) | Capacitor pressure transducer with housing | |
| US5447076A (en) | Capacitive force sensor | |
| EP0003387B1 (en) | Improved electromechanical pressure transducer | |
| JP2532128B2 (ja) | キャパシタ型圧力変換器および電気容量的圧力特定方法 | |
| US4703658A (en) | Pressure sensor assembly | |
| FI74350B (fi) | Kapacitiv absoluttryckgivare. | |
| US4617606A (en) | Capacitive pressure transducer | |
| KR0137965B1 (ko) | 최소의 유전 표류를 가지는 용량성 감지기 | |
| EP0376631A1 (en) | Differential capacitive pressure sensor with over-pressure protection and method of providing over-pressure protection to a capacitive pressure sensor | |
| JPS61221631A (ja) | 容量式絶対圧力変換器 | |
| JPS60501177A (ja) | 圧力センサ | |
| US5925824A (en) | Capacitive differential pressure detector | |
| JP3399688B2 (ja) | 圧力センサ | |
| JP3205414B2 (ja) | 圧力マイクロセンサ | |
| JPH0743625Y2 (ja) | 静電容量式荷重センサ | |
| JPS6412329B2 (en]) | ||
| JPH086275Y2 (ja) | 静電容量式荷重センサ | |
| EP0009313A1 (en) | Improved pressure transducer and assembly | |
| US7398694B2 (en) | Pressure sensor and method for manufacturing pressure sensor | |
| TW201514458A (zh) | 半導體物理量感測器 | |
| JP3461984B2 (ja) | 静電容量式絶対圧力センサ | |
| JP3370810B2 (ja) | 静電容量型圧力センサ | |
| JPH0626823Y2 (ja) | 静電容量による荷重センサ | |
| JPH06102127A (ja) | 圧力・差圧伝送器 | |
| JPH0542353Y2 (en]) |